Sensors that are used for measurements in ultra-high vacuums (UHV) normally have to meet very high cleanliness and gas evolution standards. If precision measurements are carried out in this type of environment, the use of capacitive sensors is common. The new ECT sensors are ideally suited to the very stringent demands in these environments and are now available in a special UHV-compatible version.
Special vacuum cable feedthroughs are required to transmit the sensor signals out of the vacuum. These feedthroughs are often based on BNC connectors with coaxial cable. Capacitive sensors of the capaNCDT series work with specially shielded triaxial cable, which places high demands on shielding and stability. Special unique vacuum feedthroughs have therefore been developed for use in UHV. These feedthroughs are extremely compact and of robust construction, and are the only ones that can transmit signals from triaxial cable or that can provide this level of integrity and signal quality in a vacuum environment. The feedthroughs are available for self-assembly or with a CF16 flange.
All Micro-Epsilon standard components are used for the rest of the measuring cable external to the vacuum chamber.